@Article{BragaMDSCPMO:2016:EfThAn,
               author = "Braga, T. S. and Massi, M. and Duarte, D. A. and Silva Sobrinho, 
                         A. S. and Cardoso, G. W. Alves and Pereira, F. P. and Machado, 
                         Jo{\~a}o Paulo Barros and Otani, C.",
          affiliation = "{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and 
                         {Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and 
                         {Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and 
                         {Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and 
                         {Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and 
                         {Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and 
                         {Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Tecnol{\'o}gico de Aeron{\'a}utica (ITA)}",
                title = "Effect of the thermal annealing on the properties of RF sputtered 
                         Mo-AlNxOy composite thin films",
              journal = "Vacuum",
                 year = "2016",
               volume = "129",
                pages = "115--121",
                month = "July",
             keywords = "Magnetron sputtering, Mo-AlNxOy, Thermal annealing, Thin films.",
             abstract = "In the last few years, the concentrating solar power (CSP) systems 
                         have been studied and growing surprisingly in several countries. 
                         The science and technology involved to manufacture the special 
                         materials for these devices has been a determining factor for the 
                         system performance. Among these special materials, ceramic-metal 
                         composite (cermet) is an important class largely used as a main 
                         absorber in the selective surfaces of evacuated tube collectors. 
                         This work aims to manufacture Mo-AlNxOy thin films by magnetron 
                         sputtering technique. The parameter studied was the effect of 
                         annealing temperature (600C-1100 °C) on the optical properties and 
                         surface morphology of the films. The results showed that the 
                         annealing (800-1100 °C) increase the absorptance, produces an 
                         oxidation in the bulk of the films and a breakage in the AlN 
                         surface bonds, reducing the initial quantity of nitrogen. It is 
                         noteworthy that the annealing at 600 °C did not alter the optical 
                         and morphology properties of the films, suggesting that the films 
                         of Mo-AlNxOy produced can be applied in selective surfaces in the 
                         future.",
                  doi = "10.1016/j.vacuum.2016.04.024",
                  url = "http://dx.doi.org/10.1016/j.vacuum.2016.04.024",
                 issn = "0042-207X",
             language = "en",
           targetfile = "braga_effect.pdf",
        urlaccessdate = "27 abr. 2024"
}